Patent Number: 6,670,807

Title: Proximity sensor detecting loss of magnetic field complete

Abstract: The proximity sensor includes a magnetic field source (first object) configured to generate a magnetic field, a switch plate (second object) made from a ferrous material, and a magnetic field sensor (detector). The magnetic field source and the switch plate are moveable relative to each another. The magnetic field sensor is disposed close enough to the magnetic field source to detect the magnetic field. In use, when the magnetic field source and the switch plate come into proximity of each another, the magnetic field flows from the magnetic field source to the switch plate, thereby disabling detection of the magnetic field and signaling the proximity.

Inventors: Cox; Damon Keith (Round Rock, TX)

Assignee: Applied Materials, Inc.

International Classification: H01L 21/00 (20060101); G01B 007/14 ()

Expiration Date: 12/30/2012