Patent Number: 6,757,947

Title: Method for manufacturing piezoelectric actuators and a piezoelectric actuator

Abstract: A method for a parallel manufacturing of a plurality of piezoelectric actuators and a corresponding piezoelectric actuator utilize a plurality of thin foils composed of an unfired piezoelectric ceramic material which stacked one over another. On surface of foils, an electrode is provided for each actuator. For contacting electrodes, first and second connecting openings are provided. Electrodes have cut-outs which surround either first or second connecting openings. An electrically conductive paste is introduced into connecting openings. The stacked arrangement is fired and split up into the individual actuators. As internal electrodes, the electrodes are insulated from the surroundings.

Inventors: Seipler; Dieter (Reutlingen, DE), Rothlingshofer; Walter (Reutlingen, DE), Nishigaki; Susumu (Nagoya, JP)

Assignee: Robert Bosch GmbH

International Classification: H01L 41/083 (20060101); H01L 41/24 (20060101); H04R 017/00 (); H01L 041/08 (); H01L 041/04 (); H01L 041/18 ()

Expiration Date: 07/06/2021