Patent Number: 6,761,772

Title: Workpiece support

Abstract: In order to ensure uniform coating of workpieces, workpiece holders carrying said workpieces are rotatably mounted at the edge of a turntable, a plurality of which are fastened in succession at adjustable distances to a drivable shaft. In order to trigger intermittent rotations of the workpiece holders, a driver finger of a driving device engages in each case a drive wheel thereof on each revolution of the turntable, so that the workpiece holders are rotated relative to the turntable through a specific angle in a direction opposite to the direction of rotation of said turntable. In order that no readjustment of the driver finger is required, for example in the case of a change of distances between the turntables, said driver finger is fastened to an extension of a rotating ring, which is mounted on the turntable itself so as to be non-displaceable in the direction of the shaft but rotatable about said shaft. The extension cooperates with a rod serving as a stop, in such a way that rotation of the driving device together with the turntable is prevented.

Inventors: Giacri; Laurent (Saint-Chamond, FR), Kunz; Anton (Triesenberg, LI)

Assignee: Unaxis Balzers Aktiengesellschaft

International Classification: C23C 14/50 (20060101); H01L 021/00 (); C23C 016/00 ()

Expiration Date: 07/13/2021