Patent Number: 6,762,012

Title: Method of manufacturing monolithic ink-jet printhead

Abstract: A method of manufacturing a monolithic ink-jet printhead includes a heating element which generates bubbles by heating ink is formed on a surface of the substrate, and a negative photoresist which is coated to a predetermined thickness on the substrate on which the heating element is formed. Next, a portion, which forms a sidewall of an ink passage forming wall surrounding an ink chamber and a restrictor, of the negative photoresist is flush exposed to light and cured using a first photomask in which patterns of the ink chamber and the restrictor of the ink passage are formed. Subsequently, a second portion which forms an upper wall of the ink passage forming wall of the negative photoresist is exposed to the light using a second photomask in which the pattern of a nozzle is formed, and the second portion is exposed to the light by only a predetermined thickness. Last, an uncured portion of the negative photoresist is dissolved and removed using solvent. An ink-jet printhead whose elements are monolithically formed by a simplified process using a single negative photoresist can be manufactured.

Inventors: Kim; Tae-kyun (Gyeonggi-do, KR), Cho; Seo-hyun (Gyeonggi-do, KR), Jung; Myung-song (Gyeonggi-do, KR), Kim; Kyong-il (Gyeonggi-do, KR), Park; Sung-joon (Gyeonggi-do, KR)

Assignee: Samsung Electronics Co., Ltd.

International Classification: B41J 2/05 (20060101); B41J 2/16 (20060101); B41J 2/17 (20060101); G03F 7/00 (20060101); B41J 002/16 ()

Expiration Date: 07/12016