Patent Number: 6,794,587

Title: Measuring sensor with a hermetically sealed cavity which is formed by the measuring beam and two membranes situated on each side of the beam

Abstract: The hermetically sealed measuring sensor includes a monolithic proof body having at its ends a first and a second non-deformable parts connected together by a central part designed as a deformable parallelogram. This central part has two through openings defining between them a main beam of which at least one end is joined via a connecting section to a measuring beam which performs one piece with a non-deformable part of the proof body, but is uncoupled mechanically there from. At least one of the non-deformable parts has at least one cavity of which one wall is formed by the measuring beam and by two membranes situated one on each side of this measuring beam. Strain gauges are fixed inside the cavity on the back of the measuring beam and the cavity is closed by a cover which is welded, bonded, or fixed tightly to the corresponding non-deformable part.

Inventors: Aumard; Jean-Pierre (Etrembieres, FR), Navarro; Jean-Claude (Ville-la-Grand, FR)

Assignee: S.C.A.I.M.E. S.A.

International Classification: G01L 1/22 (20060101); G01G 3/14 (20060101); G01G 3/00 (20060101); G01L 1/20 (20060101); G01G 003/14 (); G01L 001/22 ()

Expiration Date: 09/22012