Patent Number: 6,794,700

Title: Capacitor having a dielectric layer including a group 17 element

Abstract: The present invention provides a capacitor 300, a method of manufacture therefor and an integrated circuit including the same. In one embodiment of the invention, the capacitor 300 includes a first conductive plate 320 located over a semiconductor substrate 310, wherein the first conductive plate 320 has a second conductive plate 340 located thereover. The capacitor 300, in the same embodiment, further includes a dielectric layer 330 located between the first conductive plate 320 and the second conductive plate 340, wherein the dielectric layer 330 includes a Group 17 element.

Inventors: Beach; Eric (Tucson, AZ), Tian; Weidong (Dallas, TX), Hao; Pinghai (Plano, TX)

Assignee: Texas Instruments Incorporated

International Classification: H01L 27/08 (20060101); H01L 21/02 (20060101); H01L 21/316 (20060101); H01L 21/3115 (20060101); H01L 029/92 ()

Expiration Date: 09/21/2021