Patent Number: 6,798,503

Title: Edge flaw inspection device

Abstract: This device is provided with an elliptical mirror 2, a light source 5 that radiates coherent light towards an inspected edge 4 arranged near the location of its first focal point, a light blocking member 6 that blocks diffracted light of a low order that is radiated from light source 5 and reflected by inspected edge 4, and a photo detector arranged at the location of a second focal point 7 of the elliptical mirror 2. The light blocking member 6 is composed of a light absorbing member arranged on the mirrored surface of elliptical mirror 2 reached by the low order diffracted right.

Inventors: Hiramoto; Kazuyuki (Tokyo, JP), Kanno; Takashi (Koshigaya, JP)

Assignee: Raytex Corporation

International Classification: G01N 21/95 (20060101); G01N 21/88 (20060101); G01N 021/00 ()

Expiration Date: 09/22016