Patent Number: 6,806,443

Title: Ceramic susceptor

Abstract: Ceramic susceptor whose wafer-retaining face has superior isothermal properties, and that is suited to utilization in apparatuses for manufacturing semiconductors and in liquid-crystal manufacturing apparatuses. In plate-shaped sintered ceramic body 1, resistive heating element 2 is formed. Fluctuation in pullback length L between sintered ceramic body outer-peripheral edge 1a and resistive heating element substantive-domain outer-peripheral edge 2a is within .+-.0.8%, while isothermal rating of the entire surface of the wafer-retaining face is .+-.1.0% or less. Preferable is a superior isothermal rating of .+-.0.5% or less that can be achieved by bringing the fluctuation in pullback length L to within .+-.0.5%.

Inventors: Kuibira; Akira (Itami, JP), Natsuhara; Masuhiro (Itami, JP), Nakata; Hirohiko (Itami, JP)

Assignee: Sumitomo Electric Industries, Ltd.

International Classification: H01L 21/00 (20060101); H05B 3/14 (20060101); H05B 003/68 ()

Expiration Date: 10/19/2012