Patent Number: 6,806,463

Title: Micromachined field asymmetric ion mobility filter and detection system

Abstract: A micromechanical field asymmetric ion mobility filter for a detection system includes a pair of spaced substrates defining between them a flow path between a sample inlet and an outlet; an ion filter disposed in the path and including a pair of spaced filter electrodes, one electrode associated with each substrate; and an electrical controller for applying a bias voltage and an asymmetric periodic voltage across the ion filter electrodes for controlling the paths of ions through the filter.

Inventors: Miller; Raanan A. (Brookline, MA), Nazarov; Erkinjon G. (Lexington, MA)

Assignee: The Charles Stark Draper Laboratory, Inc.

International Classification: G01N 27/64 (20060101); H01J 49/42 (20060101); H01J 49/34 (20060101); H01J 049/40 ()

Expiration Date: 10/19/2021