Patent Number: 6,885,014

Title: Symmetric beamline and methods for generating a mass-analyzed ribbon ion beam

Abstract: Ion implantation systems and beamlines therefor are disclosed, in which a ribbon beam of a relatively large aspect ratio is mass analyzed and collimated to provide a mass analyzed ribbon beam for use in implanting one or more workpieces. The beamline system comprises two similar magnets, where the first magnet mass analyzes the ribbon beam to provide an intermediate mass analyzed ion beam, and the second magnet collimates the intermediate beam to provide a uniform mass analyzed ribbon beam to an end station. The symmetrical system provides equidistant beam trajectories for ions across the elongated beam width so as to mitigate non-linearities in the beam transport through the system, such that the resultant mass analyzed beam is highly uniform.

Inventors: Benveniste; Victor M. (Gloucester, MA)

Assignee: Axcelis Technologies, Inc.

International Classification: H01J 37/08 (20060101); H01J 27/00 (20060101); H01J 37/04 (20060101); H01J 27/16 (20060101); H01J 27/06 (20060101); H01J 37/317 (20060101); H01J 27/02 (20060101); H01J 037/317 ()

Expiration Date: 4/26/02017