Patent Number: 6,966,228

Title: Resonator-type microelectronic pressure sensor that withstands high pressures

Abstract: A microelectronic pressure sensor comprises a resonator (23) made on the basis of a crystalline material and secured to the inside of a package (24) made use of a cap (27) and a baseplate (26) for assembling one to the other. The cap (27) and the baseplate (26) are made completely or almost completely out of the same material as the resonator (23), and the pressure (Pe) to be detected is applied all around the package.

Inventors: Binet; Florence (Sugar Land, TX), Donzier; Eric (Brookfield, CT), Lelong-Feneyrou; Sandrine (Igny, FR)

Assignee: Schlumberger Technology Corporation

International Classification: G01L 9/00 (20060101); G01L 009/00 ()

Expiration Date: 1/22/02018