Patent Number: 6,966,934

Title: Gas reclaiming equipment

Abstract: A gas reclaiming equipment capable of separating SF.sub.6 gas from a mixed gas efficiently and shortening reclaiming work under reduced pressure. A gas separation equipment is provided between a gas insulated equipment and a gas liquefaction system. The gas separation equipment separates nitrogen gas from the mixed gas, and concentrates SF6 gas. Only SF.sub.6 gas is sent into the gas liquefaction system. The gas separation equipment uses pressure swing adsorption using an adsorbent with selective adsorption. Moreover, a buffer tank for storing mixed gas is provided between the gas separation equipment and the gas insulated equipment. The buffer tank and the gas liquefaction system are connected by a reflux-line. The reflux-line refluxes the gas in a gas phase in the gas liquefaction system to the buffer tank. Furthermore, the gas separation equipment is connected to a storage tank. The storage tank accumulates the nitrogen gas separated with the gas separation equipment. The adsorbent to adsorb SF.sub.6 gas is enclosed in the storage tank for exhaust gas. To absorb decomposed gas, the filter has an adsorbent of the chemisorption type. The adsorbent has of a metal hydrate.

Inventors: Sato; Toshikazu (Tokyo, JP), Inohara; Toshiaki (Kanagawa-ken, JP), Murase; Hiroshi (Kanagawa-ken, JP), Naotsuka; Hiromi (Kanagawa-ken, JP), Imai; Takahiro (Kanagawa-ken, JP)

Assignee: Kabushiki Kaisha Toshiba

International Classification: F25J 3/08 (20060101); F25J 3/06 (20060101); B01D 039/00 (); A62B 007/08 ()

Expiration Date: 1/22/02018