Patent Number: 6,984,555

Title: Device and method for inhibiting oxidation of contact plugs in ferroelectric capacitor devices

Abstract: A ferroelectric capacitor device and method for producing such a device comprises forming a substrate, and forming a contact plug passing through the substrate. An electrically insulating layer is formed on the substrate, and a first electrode is formed on the electrically insulating layer. A ferroelectric layer is formed on the first electrode and a second electrode is formed on the ferroelectric layer. The first electrode is then electrically connected to the plug through the electrically insulating layer.

Inventors: Lian; Jingyu (Wallkill, NY)

Assignee: Infineon Technologies AG

International Classification: H01L 21/8242 (20060101)

Expiration Date: 1/10/02018