Patent Number: 7,029,955

Title: Optically and electrically programmable silicided polysilicon fuse device

Abstract: A silicided polysilicon based fuse device that is programmable by optical and electrical energy in the polysilicon layer without damage to nearby structures, comprising: a Si substrate; an insulating layer disposed on the substrate; and a fuse device section comprising poly-Si/a silicide/ and a barrier layer, the fuse device section forming an electrical discontinuity in the poly Si layer in response to an electrical pulse or an optical pulse applied to it.

Inventors: Kothandaraman; Chandrasekharan (Wappingers Falls, NY)

Assignee: Infineon Technologies AG

International Classification: H01L 21/82 (20060101)

Expiration Date: 4/18/02018