Patent Number: 7,041,977

Title: Electron microscope

Abstract: An object of the present invention is to provide an electron microscope that is capable of improving work efficiency when restarting sample observation. A control unit for controlling observation-condition setting devices, which include an electron-gun control unit, an irradiation-lens control unit, an objective-lens control unit, a magnifying-lens-system control unit, and a sample-stage control unit, is provided. When image data of a certain sample is specified, observation condition data of the sample is retrieved. Then, observation conditions, which are the same as those used when the image data of the sample has been saved, are automatically restored on an electron microscope on the basis of the observation condition data. As a result, an image, which is the same as the stored image, is restored faithfully.

Inventors: Nakazawa; Eiko (Mito, JP), Nagaoki; Isao (Hitachinaka, JP)

Assignee: Hitachi, Ltd.

International Classification: H01J 37/26 (20060101)

Expiration Date: 5/09/02018