Patent Number: 7,042,136

Title: Piezoelectric thin-film element and a manufacturing method thereof

Abstract: To provide a piezoelectric thin-film element small in leak current between electrode metal films and its manufacturing method are presented, the piezoelectric thin-film element includes at least one unit laminated body composed of a piezoelectric thin-film having a mutually facing first surface and second surface, a first electrode metal film on the first surface, and a second electrode metal film on the second surface, in which an electrode separation surface composed of a piezoelectric thin-film surface parallel to the first surface is provided between the first electrode metal film and second electrode metal film.

Inventors: Kita; Hiroyuki (Osaka, JP), Uchiyama; Hirokazu (Higashiosaka, JP)

Assignee: Matsushita Electric Industrial Co., Ltd.

International Classification: H01L 41/083 (20060101)

Expiration Date: 5/09/02018