Patent Number: 7,042,574

Title: Compensating for effects of non-isotropic gas mixtures in interferometers

Abstract: Methods and apparatus for reducing the effects of non-isotropic gas distributions on interferometry measurements are disclosed.

Inventors: Hill; Henry A. (Tucson, AZ)

Assignee: Zygo Corporation

International Classification: G01B 9/02 (20060101)

Expiration Date: 5/09/02018