Patent Number: 7,043,325

Title: Method and apparatus for determining product-specific error and tool drift

Abstract: The present invention provides a method and apparatus for determining product-specific model errors. The method includes determining a plurality of product model errors associated with a corresponding one of a plurality of products. The method also includes determining at least one input parameter for a process model to be used in processing a workpiece to form one of the plurality of products based upon the product model error associated with the product to be formed on the workpiece.

Inventors: Adams, III; Ernest (Austin, TX)

Assignee: Advanced Micro Devices, Inc.

International Classification: G06F 19/00 (20060101)

Expiration Date: 5/09/02018