Patent Number: 7,084,953

Title: Lithographic apparatus, device manufacturing method and device manufactured thereby

Abstract: A lithographic projection apparatus includes conduits which supply utilities to components in a vacuum chamber such as object tables and/or associated motors and/or sensors. The conduits are shielded from exposure to the vacuum by conduit conducts having at least the same number of degrees of freedom as their associated object table.

Inventors: Driessen; Johannes Cornelis (Eindhoven, NL), Soemers; Hermanus Mathias Joannes Rene (Mierlo, NL), Renkens; Michael Jozefa Mathijs (Sittard, NL), Bisschops; Theodorus Hubertus Josephus (Eindhoven, NL), Vermeulen; Johannes Petrus Martinus Bernardus (Valkenswaard, NL), Rijken; Antonius Maria (Nuenen, NL)

Assignee: ASML Netherlands B.V.

International Classification: G03B 27/52 (20060101)

Expiration Date: 8/01/02018