Patent Number: 7,084,966

Title: Optical measurement of device features using lenslet array illumination

Abstract: The properties of features formed in a substrate are measured. Lenslet array illumination is used to illuminate regions of a substrate so that the features of interest occupy a greater proportion of the illuminated area. The signal-to-noise ratio of the measurement signal is therefore increased, and the sensitivity of the measurement is thus improved.

Inventors: Zaidi; Syed Shoaib Hasan (Poughkeepsie, NY)

Assignee: Infineon Technologies AG

International Classification: G01N 21/00 (20060101)

Expiration Date: 8/01/02018