Patent Number: 7,085,122

Title: MEMS tunable capacitor based on angular vertical comb drives

Abstract: A MEMS tunable capacitor with angular vertical comb-drive (AVC) actuators is described where high capacitances and a wide continuous tuning range is achieved in a compact space. The comb fingers rotate through a small vertical angle which allows a wider tuning range than in conventional lateral comb drive devices. Fabrication of the device is straightforward, and involves a single deep reactive ion etching step followed by release and out-of-plane assembly of the angular combs.

Inventors: Wu; Ming C. (Pacific Palisades, CA), Nguyen; Hung D. (Los Angeles, CA), Hah; Doo-Young (Daejeon, KR), Patterson; Pamela R. (Los Angeles, CA)

Assignee: The Regents of the University of California

International Classification: H01G 7/00 (20060101)

Expiration Date: 8/01/02018