Patent Number: 7,085,658

Title: Method and apparatus for rapid inline measurement of parameter spreads and defects in integrated circuit chips

Abstract: A method and apparatus for monitoring a plurality of semiconductor devices is disclosed. At least one array of 2.sup.n semiconductor circuits is provided. A clock ring oscillator provides a clock signal. The clock signal drives a frequency divider followed by an n-stage binary counter. The outputs from the counter's stages drive an n-input decoder which sequentially addresses each semiconductor circuit. An output signal from each semiconductor circuit is measured and read out over a common bus, where a distribution of the output signals is a measure of a distribution of a parameter of interest.

Inventors: Bhushan; Manjul (Hopewell Junction, NY), Ketchen; Mark B. (Hadley, MA)

Assignee: International Business Machines Corporation

International Classification: G06F 19/00 (20060101)

Expiration Date: 8/01/02018