Patent Number: 7,086,288

Title: Thin membrane transducer

Abstract: A transducer includes a substrate and a thin membrane having a shape that can be deflected relative to the substrate to provide an amount of membrane deflection useful for sensing or actuation purposes.

Inventors: Lee; Junghoon (Wilmette, IL), Chung; JaeHyun (Evanston, IL), Lee; Kyong-Hoon (Wilmette, IL)

Assignee: Northwestern University

International Classification: G01L 9/12 (20060101)

Expiration Date: 8/08/02018