Patent Number: 7,087,144

Title: Contact ring with embedded flexible contacts

Abstract: A contact assembly for supporting a substrate in an electrochemical plating system, wherein that contact assembly includes a contact ring and a thrust plate assembly. The contact ring includes an annular ring member having an upper surface and a lower surface, an annular bump member positioned on the upper surface, and a plurality of flexible and conductive substrate contact fingers extending radially inward from the lower surface. The thrust plate includes an annular plate member sized to be received within the annular ring member, and a seal member extending radially outward from the plate member, the seal member being configured to engage the annular bump member for form a fluid seal therewith.

Inventors: Herchen; Harald (Los Altos, CA)

Assignee: Applied Materials, Inc.

International Classification: C25D 17/06 (20060101); C25D 17/08 (20060101); C25D 3/38 (20060101); C25D 7/12 (20060101)

Expiration Date: 8/08/02018