Patent Number: 7,087,187

Title: Meta oxide coated carbon black for CMP

Abstract: Using coated carbon black particles, coated with a selected coating material, as an abrasive in slurries or polishing pads for chemical-mechanical polishing processes. By adjusting the coating material on the carbon black particles, new abrasive particles for chemical-mechanical polishing are created with tailored performance properties.

Inventors: Grumbine; Steven K. (Aurora, IL)


International Classification: C09K 13/00 (20060101)

Expiration Date: 8/08/02018