Patent Number: 7,087,297

Title: Protective film transfer sheet for photo masks and a method for transferring a protective film using the same

Abstract: A protective film transfer sheet comprises a peelable support and a protective film formed on the support, wherein the protective film comprises a protective layer and an adhesive layer formed on the support in this order and the adhesive layer has pressure-sensitive adhesiveness, the adhesiveness of the adhesive layer being increased upon heating after transferred on the image surface of photo masks, and is curable by exposure to ionizing radiation. The protective film formed by the protective film transfer sheet is excellent in adhesiveness to the image surface of photo masks, mar resistance and resistance to solvents.

Inventors: Maruyama; Mitsunori (Saitama, JP), Kurishima; Susumu (Saitama, JP)

Assignee: Kimoto Co., Ltd.

International Classification: B32B 7/12 (20060101); B32B 15/04 (20060101)

Expiration Date: 8/08/02018