Patent Number: 7,087,444

Title: Method for integration of microelectronic components with microfluidic devices

Abstract: A method of forming an integrated microelectronic device and a micro channel is provided. The method offers an inexpensive way of integrating devices that are usually incompatible during fabrication, a microchannel and a microelectronic structure such as an electro-optic light source, a detector or a MEMs device into a single integrated structure.

Inventors: Wong; William S. (San Carlos, CA), Chabinyc; Michael L. (Mountain View, CA), Ready; Steven E. (Santa Cruz, CA), Kneissl; Michael A. (Mountain View, CA), Teepe; Mark R. (Menlo Park, CA)

Assignee: Palo Alto Research Center Incorporated

International Classification: H01L 21/00 (20060101)

Expiration Date: 8/08/02018