Patent Number: 7,087,527

Title: Extended kalman filter incorporating offline metrology

Abstract: An algorithm uses offline metrology to control a process by passing information from an outer control loop to an inner control loop, extended Kalman filter estimator. The inner control loop operates online, and the outer control loop operates asynchronously with respect to the inner control loop. The online control loop is updated for each subsequent process. The offline metrology is optionally updated for each subsequent process.

Inventors: Hofmann; Jim (Boise, ID)

Assignee: Micron Technology, Inc.

International Classification: H01L 21/302 (20060101)

Expiration Date: 8/08/02018