Patent Number: 7,087,561

Title: Cleaning composition useful in semiconductor integrated circuit fabrication

Abstract: A composition for use in semiconductor processing wherein the composition comprises water, phosphoric acid, and an organic acid; wherein the organic acid is ascorbic acid or is an organic acid having two or more carboxylic acid groups (e.g., citric acid). The water can be present in about 40 wt. % to about 85 wt. % of the composition, the phosphoric acid can be present in about 0.01 wt. % to about 10 wt. % of the composition, and the organic acid can be present in about 10 wt. % to about 60 wt. % of the composition. The composition can be used for cleaning various surfaces, such as, for example, patterned metal layers and vias by exposing the surfaces to the composition.

Inventors: Yates; Donald L. (Boise, ID), Hineman; Max F. (Boise, ID)

Assignee: Micron Technology, Inc.

International Classification: H01L 21/302 (20060101)

Expiration Date: 8/08/02018