Patent Number: 7,088,120

Title: Method and apparatus for measuring and evaluating local electrical characteristics of a sample having a nano-scale structure

Abstract: A probe device including a cantilever. A probe is attached to the cantilever and is allocated to be opposed to a surface of a sample attached thereto. An apparatus is provided with the probe device, which is capable of carrying out measurement of the sample while switching at a predetermined period two operating modes, a tapping mode for measuring a surface structure of the sample while vibrating the cantilever and a point contact mode for measuring an electrical characteristic of the sample while bringing the probe into contact with the sample.

Inventors: Matsumoto; Takuya (Kyoto, JP), Otsuka; Yoicho (Ikeda, JP), Naitoh; Yasuhisa (Tsukuba, JP), Kawai; Tomoji (Mino, JP)

Assignee: Osaka University

International Classification: G01R 31/02 (20060101); G01R 27/08 (20060101)

Expiration Date: 8/08/02018