Patent Number: 7,088,451

Title: Scatterometry by phase sensitive reflectometer

Abstract: A phase-sensitive interferometric broadband reflectometer includes an illumination source for generating an optical beam. A beam splitter or other optical element splits the optical beam into probe beam and reference beam portions. The probe beam is reflected by a subject under test and then rejoined with the reference beam. The combination of the two beams creates an interference pattern that may be modulated by changing the length of the path traveled by the probe or reference beams. The combined beam is received and analyzed by a spectrometer.

Inventors: Sezginer; Abdurrahman (Los Gatos, CA)

Assignee: Tokyo Electron Limited

International Classification: G01B 9/02 (20060101)

Expiration Date: 8/08/02018