Patent Number: 7,088,492

Title: Micro movable mechanism system and control method for the same

Abstract: A micro movable mechanism system includes a micro movable mechanism. A target position generating section generates a signal indicative a target position of the micro movable mechanism. A nonlinear control unit outputs a controller output signal indicating a control value based on a difference between the target position signal and a signal indicating a current position of the micro movable mechanism. A root correction section drives the micro movable mechanism based on a signal proportional to a square root of the control value.

Inventors: Yanagita; Yoshiho (Tokyo, JP), Yoshizawa; Shin (Tokyo, JP)

Assignee: Denso Corporation

International Classification: G02B 26/08 (20060101); G02B 26/00 (20060101)

Expiration Date: 8/08/02018