Patent Number: 7,088,566

Title: Charge control of micro-electromechanical device

Abstract: A charge control circuit for controlling a micro-electromechanical system (MEMS) device having variable capacitor formed by first conductive plate and a second conductive plate separated by a variable gap distance. The charge control circuit comprises a switch circuit configured to receive a reference voltage having a selected voltage level and configured to respond to an enable signal having a duration at least as long as an electrical time constant constant of the MEMS device, but shorter than a mechanical time constant of the MEMS device, to apply the selected voltage level across the first and second plates for the duration to thereby cause a stored charge having a desired magnitude to accumulate on the variable capacitor, wherein the variable gap distance is a function of the magnitude of the stored charge.

Inventors: Martin; Eric T. (Corvallis, OR), Hunter; Mark (Portland, OR), Piehl; Arthur (Corvallis, OR), Przybyla; James R. (Philomath, OR), Gelhaus; Matthew (Albany, OR), Szepesi, Jr.; Leslie Louis (Salem, OR)

Assignee: Hewlett-Packard Development Company, L.P.

International Classification: H01H 47/00 (20060101)

Expiration Date: 8/08/02018