Patent Number: 7,089,072

Title: Semiconductor manufacturing fault detection and management system and method

Abstract: The present disclosure provides a semiconductor manufacturing fault detection and management system and method for monitoring at least one manufacturing entity to detect state changes.

Inventors: Chia; Tong Lung (Jhubei, TW)

Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.

International Classification: G06F 19/00 (20060101)

Expiration Date: 8/08/02018