Patent Number: 7,089,075

Title: Systems and methods for metrology recipe and model generation

Abstract: Systems and methodologies are disclosed for generating setup information for use measuring process parameters associated with semiconductor devices. A system comprises an off-line measurement instrument to measure an unpatterned wafer and a setup information generator to generate setup information according to the unpatterned wafer measurement. The system then provides the setup information to a process measurement system for use in measuring production wafers in a semiconductor manufacturing process.

Inventors: Hasan; Talat Fatima (Saratoga, CA)

Assignee: Tokyo Electron Limited

International Classification: G06F 19/00 (20060101)

Expiration Date: 8/08/02018