Patent Number: 7,100,282

Title: Method of manufacturing a piezoelectric vibration element for an inkjet recording head

Abstract: The present invention relates to a method of manufacturing a piezoelectric vibration element unit used for an inkjet recording head. The method includes the steps of alternately laminating conductive layers and piezoelectric material layers, sintering a laminated structure after the conductive layers and the piezoelectric layers are laminated to a predetermined thickness, forming external connection electrodes on surfaces of the sintered structure, and fixing a non-vibration region of the sintered structure onto a fixing plate. A region of the structure where the conductive layers are formed is cut into drive piezoelectric vibration elements, and a region of the structure where the conductive layers are not formed is cut into a dummy piezoelectric element.

Inventors: Kitahara; Tsuyoshi (Nagano, JP), Arai; Hiroshi (Nagano, JP)

Assignee: Seiko Epson Corporation

International Classification: B21D 53/76 (20060101); B41J 2/045 (20060101)

Expiration Date: 9/05/02018