Patent Number: 7,101,272

Title: Carrier head for thermal drift compensation

Abstract: Systems and apparatus providing a carrier head for chemical mechanical polishing are described. The carrier head includes a base, a support structure attached to the base, a retaining structure attached to the base, and a connector attached to the base and the retaining structure. The support structure includes a receiving surface for contacting a substrate. The retaining structure prevents the substrate from moving along the receiving surface. The base and the retaining structure can thermally expand at different rates of expansion without causing distortion to one another.

Inventors: Chen; Hung Chih (Santa Clara, CA), Zuniga; Steven M. (Soquel, CA)

Assignee: Applied Materials, Inc.

International Classification: B24B 1/00 (20060101)

Expiration Date: 9/05/02018