Patent Number: 7,101,273

Title: Carrier head with gimbal mechanism

Abstract: A carrier head includes a housing connectable to a drive shaft to rotate therewith, a lower assembly having a substrate mounting surface, and a gimbal mechanism that connects the housing to the lower assembly to permit the lower assembly to pivot with respect to the housing about an axis substantially parallel to the polishing surface. The gimbal mechanism includes a shaft having an upper end slidably disposed in a vertical passage in a vertical passage in the housing, and a lower member that connects a lower end of the shaft to the lower assembly. The lower member bends to permit the base to pivot with respect to the housing. The shaft and the lower member are a unitary body.

Inventors: Tseng; Ming-Kuei (San Jose, CA), Zuniga; Steven M. (Soquel, CA)

Assignee: Applied Materials, Inc.

International Classification: B24B 5/00 (20060101)

Expiration Date: 9/05/02018