Patent Number: 7,101,654

Title: Norbornene-type monomers and polymers containing pendent lactone or sultone groups

Abstract: The disclosed invention relates to novel norbornene-type monomers containing pendent lactone or sultone groups. The invention also relates to norbornene-type polymers and copolymers comprising one or more repeating units represented by the formula: ##STR00001## and containing pendent lactone or sultone groups. These polymers and copolymers are useful in making photoimagable materials. The photoimagable materials are particularly suitable for use in photoresist compositions useful in 193 and 157 nm photolithography.

Inventors: Wu; Xiaoming (Strongsville, OH), Rhodes; Larry F. (Silver Lake, OH), Seger; Lawrence (Gates Mills, OH)

Assignee: Promerus LLC

International Classification: G03F 7/039 (20060101); C08F 28/06 (20060101); C08G 77/00 (20060101); G03F 7/075 (20060101); G03F 7/30 (20060101)

Expiration Date: 9/05/02018