Patent Number: 7,101,723

Title: Optical device, laser beam source, laser apparatus and method of producing optical device

Abstract: After forming domain inverted layers 3 in an LiTaO.sub.3 substrate 1, an optical waveguide is formed. By performing low-temperature annealing for the optical wavelength conversion element thus formed, a stable proton exchange layer 8 is formed, where an increase in refractive index generated during high-temperature annealing is lowered, thereby providing a stable optical wavelength conversion element. Thus, the phase-matched wavelength becomes constant, and variation in harmonic wave output is eliminated. Consequently, with respect to an optical wavelength conversion element utilizing a non-linear optical effect, a highly reliable element is provided.

Inventors: Yamamoto; Kazuhisa (Takatsuki, JP), Mizuuchi; Kiminori (Neyagawa, JP), Kitaoka; Yasuo (Kawachinagano, JP), Kato; Makoto (Nishinomiya, JP)

Assignee: Matsushita Electric Industrial Co., Ltd.

International Classification: H01L 21/00 (20060101)

Expiration Date: 9/05/02018