Patent Number: 7,101,810

Title: Transparent article having protective silicon nitride film

Abstract: Transparent articles comprising transparent, nonmetallic substrate and a transparent film stack is sputter deposited on the substrate. The film stack is characterized by including at least one infrared reflective metal film, a dielectric film over the metal film, and a protective silicon nitride film of 10 .ANG. to 150 .ANG. in thickness over the said dielectric film. The dielectric film desirably has substantially the same index of refraction as does silicon nitride and is contiguous with the silicon nitride film.

Inventors: Bond; Robert (Spring Green, WI), Stanek; Roger P. (Spring Green, WI), Hoffman; Wayne L. (Spring Green, WI)

Assignee: Cardinal CG Company

International Classification: H01L 21/469 (20060101)

Expiration Date: 9/05/02018