Patent Number: 7,102,743

Title: Semiconductor wafer inspection apparatus

Abstract: A semiconductor wafer inspection apparatus is provided with a rotatable table on which a semiconductor wafer is held by suction, an illuminating device which illuminates at least an edge portion of the semiconductor wafer held on the rotatable table, an imaging device which captures an image of the edge portion of the semiconductor wafer when the edge portion is illuminated by the illuminating device, an image processing device which detects at least an edge cut amount or a crack by acquiring the image of the edge portion which is captured by the imaging device, and a display section which displays an image of the edge portion subjected to image processing by the image processing device.

Inventors: Tsuji; Haruyuki (Ina, JP), Kitahara; Yasutoshi (Ina, JP), Hashimoto; Katsuyuki (Hachioji, JP), Ikeno; Yasunori (Okaya, JP), Kurata; Shunsuke (Kamiina-gun, JP), Yazawa; Masahiko (Hachioji, JP)

Assignee: Olympus Corporation

International Classification: G01N 21/00 (20060101)

Expiration Date: 9/05/02018