Patent Number: 7,102,871

Title: Electrostatic chuck assembly having disassembling device

Abstract: A disassembling device for separating a pedestal, a ceramic element and a base from an electrostatic chuck assembly. The base has a first end surface and a second end surface. The ceramic element is disposed on the first end surface. The pedestal is disposed on the ceramic element. The disassembling device includes a main body and at least one pushing element. The main body is disposed on the second end surface and has a through hole. The at least one pushing element penetrates the through hole and pushes against the ceramic element and pedestal to separate the ceramic element and pedestal from the first end surface of the base.

Inventors: Chang; Cheng-Liang (Hsinchu, TW), Chuang; Ray (Taipei, TW), Wei; Jen (Chia-I, TW), Huang; Chian-Kuo (Hsinchu, TW), Lai; Huan-Wen (Changhua County, TW), Lee; Ching-Sun (Junghe, TW), Chuang; Cheng-Yua (Kaohsiung, TW), Lo; Chi-Ching (Hsinchu, TW), Chiou; Neo-Feng (Taichung County, TW), Huang; Yen-Bo (Taipei, TW)

Assignee: Taiwan Semiconductor Manufacturing Co,, Ltd.

International Classification: H01T 23/00 (20060101)

Expiration Date: 9/05/02018