Patent Number: 7,103,210

Title: Position detection apparatus and exposure apparatus

Abstract: A position detection apparatus for detecting a position of a mark on an object includes a camera which captures an image of the mark, an extraction section which extracts a plurality of edge positions of the mark based on a signal derived from the image of the mark, each of the edge positions being associated with a combination of a direction and a polarity of the signal, and a determination section which determines a position of the mark, by comparing each of the plurality of extracted edge positions with a corresponding one of templates prepared for the respective combinations.

Inventors: Tanaka; Hiroshi (Utsunomiya, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: G06K 9/00 (20060101)

Expiration Date: 9/05/02018