Patent Number: 7,131,562

Title: Scribing and breaking apparatus, system therefor, and scribing and breaking method

Abstract: A separation apparatus comprising a first and a second scribing means for scribing front and rear surfaces of a first mother substrate made of a brittle material along first predetermined scribing lines previously provided on the front and rear surfaces of the first mother substrate, the first and second scribing means being opposed to each other on an upper side and a lower side, and a holding and transferring means for holding and transferring the first mother substrate so that the first predetermined scribing lines of the first mother substrate are located between the first and second scribing means.

Inventors: Ueyama; Hiroki (Osaka, JP), Ejimatani; Akira (Osaka, JP)

Assignee: Mitsuboshi Diamond Industrial Co., Ltd.

International Classification: B26F 3/00 (20060101); B26D 3/08 (20060101); B31B 1/25 (20060101)

Expiration Date: 2019-11-07 0:00:00