Patent Number: 7,133,489

Title: X-ray illumination optical system and X-ray reduction exposure apparatus

Abstract: An illumination optical system illuminates a surface to be illuminated. The illumination optical system includes a mirror having a surface effective to shape X-rays from a source into X-rays having an arcuate sectional shape, and an optical system for illuminating the surface to be illuminated, with the X-rays having an arcuate sectional shape from the mirror and in an oblique direction with respect to that surface.

Inventors: Miyake; Akira (Utsunomiya, JP), Tsukamoto; Masami (Yokohama, JP)

Assignee: Canon Kabushiki Kaisha

International Classification: G21K 5/00 (20060101)

Expiration Date: 2019-11-07 0:00:00