Patent Number: 7,133,735

Title: Experiment management system and method thereof in semiconductor manufacturing environment

Abstract: A system and method thereof for experiment management. A storage device stores an experiment plan record, a merge constraint and an integration rule. A processing unit configured to acquire a first experiment plan from the experiment plan record, and a second experiment plan. The processing unit generates an integrated experiment plan by merging the first experiment plan and the second experiment plan according to the merge constraint and the integration rule, and stores the integrated experiment plan to the storage device.

Inventors: Kuo; Wen-Chang (Hsinchu, TW), Huang; Chien-Chung (Taichung, TW), Yang; Huei-Wen (Taichung, TW), Huang; Yi-Lin (Keelung, TW)

Assignee: Taiwan Semiconductor Manufacturing Co., Ltd

International Classification: G06F 19/00 (20060101)

Expiration Date: 2019-11-07 0:00:00