Patent Number: 7,232,514

Title: Method and composition for polishing a substrate

Abstract: Polishing compositions and methods for removing conductive materials from a substrate surface are provided. In one aspect, a composition includes an acid based electrolyte system, one or more chelating agents, one or more corrosion inhibitors, one or more inorganic or organic acid salts, one or more pH adjusting agents to provide a pH between about 2 and about 10, a polishing enhancing material selected from the group of abrasive particles, one or more oxidizers, and combinations thereof, and a solvent. The composition may be used in an conductive material removal process including disposing a substrate having a conductive material layer formed thereon in a process apparatus comprising an electrode, providing the composition between the electrode and substrate, applying a bias between the electrode and the substrate, and removing conductive material from the conductive material layer.

Inventors: Liu; Feng Q. (San Jose, CA), Tsai; Stan D. (Fremont, CA), Hu; Yongqi (Campbell, CA), Neo; Siew S. (Santa Clara, CA), Wang; Yan (Sunnyvale, CA), Duboust; Alain (Sunnyvale, CA), Chen; Liang-Yuh (Foster City, CA)

Assignee: Applied Materials, Inc.

International Classification: C25F 3/00 (20060101)

Expiration Date: 2019-06-19 0:00:00