Patent Number: 7,280,712

Title: Method and apparatus for phase shifiting an optical beam in an optical device

Abstract: An apparatus and method for high speed phase modulation of optical beam. For one embodiment, an apparatus includes an optical waveguide having adjoining first and second regions disposed in semiconductor material. The first and second regions have opposite doping types. A first buffer is disposed along the optical waveguide. A first higher doped region of semiconductor material is also included outside an optical path of the optical waveguide. An inner portion of the first higher doped region is adjoining and coupled to the first region of the optical waveguide. An outer portion of the first higher doped region is adjoining the first buffer. The first higher doped region has a higher doping concentration than a doping concentration within the optical path of the optical waveguide. A first contact having an inner portion adjoining and coupled to the first higher doped region is also included. The first contact has an outer portion adjoining the first buffer.

Inventors: Liu; Ansheng (Cupertino, CA)

Assignee: Intel Corporation

International Classification: G02F 1/035 (20060101)

Expiration Date: 2019-10-09 0:00:00