Patent Number: 7,356,378

Title: Method and system for smart vehicle route selection

Abstract: In one aspect a factory automation system for a wafer fab is provided. The factory automation system comprises: a manufacturing execution system ("MES") for providing lot information; a material control system ("MCS") for providing dynamic traffic information; an automated material handling system ("AMHS") for providing static route information; and a real-time dispatching ("RTD") system to select a destination and a route for a wafer carrier in response to a transfer request. In another aspect a method of transferring a wafer lot within a wafer fabrication facility ("fab") using a factory automation system is provided. The method comprises: receiving a transfer request to move the wafer lot from a first position to a second position within the fab; obtaining lot information, dynamic traffic information, and static traffic information; using the information to select a route between the first position and the second position; and executing the transfer using the selected route.

Inventors: Huang; Chih-Wei (Hsinchu County, TW), Chen; Hui-Yi (Taoyuan County, TW), Yu; Ren-Chyi (Yilan County, TW), Yu; Chuh-Yuan (ChangHua County, TW)

Assignee: Taiwan Semiconductor Manufacturing Company

International Classification: G06F 7/00 (20060101)

Expiration Date: 2020-04-08 0:00:00